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Rates

HMNTL is one of the few university-based research facilities that accommodates semiconductor growth and fabrication with biological experimentation in the same building. For the safety of everyone in the building, the cleanrooms are access controlled, meaning researchers can only work in the labs after completing proper training. The Bionanotechnology Lab is also access controlled, so users must first complete extensive training before working in this complex.


Effective 5/1/2025

Holonyak Lab Rates and Charges

Fee Type University
Internal
Other Academic
Institutions
Industry
Cleanroom Facilities Access Fee $20/hour $30/hour $75/hour

BioNanotechnology Facilities Access Fee  $18/day $30/day $30/day
Characterization Lab Access Fee $10/day $10/day $10/day
Safety & Training Fee $110 one-time fee per keycard
HMNTL Building Access Fee

$35 per month per keycard issued

HMNTL Cleanroom Equipment with Supplemental Charges

Note:  although many commonly used chemicals and supplies are available in the cleanrooms, users will be required to supply certain materials such as precious metals used for depositions, resists and developers, and special chemicals used in non-standard processes. 

* The hourly cleanroom fee (see above) will also apply to staff-operated hourly charges for the E-Beam, SEM, and MOCVD.

** Other Academic Institutions and Industry will also pay an additional rate of 31.7% for Facilities & Administration.

Elionix Electron-Beam Lithography System University
Internal
Other Academic
Institutions
Industry
User-operated E-beam Write-time Charge $90/hour $90/hour** $130/hour**
Staff-operated E-Beam Write-time Charge* $90/hour $90/hour** $180/hour**
Hitachi S4800 Scanning Electron Microscope (SEM) University
Internal
Other Academic
Institutions
Industry
User-operated $20/hour $20/hour** $50/hour**
Staff-operated* $40/hour $40/hour** $100/hour**
AIXTRON MOCVD University
Internal
User-operated $32/hour
Staff-operated* $64/hour
Atomic Force Microscope (AFM) University
Internal
Other Academic
Institutions
Industry
User-operated

$10.50/hour

$10.50/hour**

$37.85/hour**

Staff-operated*

$57.00/hour

$57.00/hour**

$57.00/hour**

Oxford PECVD

University
Internal
Other Academic
Institutions
Industry
User-operated  $16/hour  $16/hour   $16/hour

Oxford Freon RIE

University
Internal
Other Academic
Institutions
Industry
User-operated $16/hour $16/hour $16/hour

Oxford Freon ICP RIE

University
Internal
Other Academic
Institutions
Industry
User-operated $16/hour $16/hour $16/hour

Oxford Mixed ICP RIE

University
Internal
Other Academic
Institutions
Industry
User-operated $16/hour $16/hour $16/hour

Oxford Chlorine ICP RIE

University
Internal
Other Academic
Institutions
Industry
User-operated $16/hour $16/hour $16/hour

HMNTL Biolab Equipment with Supplemental Charges

* The daily biolab fee (see above) will also apply to researchers using the equipment outlined below.

** Other Academic Institutions and Industry will also pay an additional rate of 31.7% for Facilities & Administration.

Equipment University
Internal
Other Academic
Institutions
Industry
Digital PCR   $7.41 per sample $7.41 per sample $12.35 per sample

Holonyak Micro & Nanotechnology Lab

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208 North Wright Street

Urbana, IL 61801

Phone: 217-333-3097

Fax:

Email: mntl@illinois.edu

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