Karl SUSS MJB3 Contact Mask Aligners
Karl Suss MJB3 is a Manual contact/proximity photolithography mask aligner and exposure tool. Currently we have two MJB3 systems named MJB3-A equipped 350W Hg arc lamp and 320nm filter and MJB3-C equipped 350W Hg arc lamp and 365nm filter. Both can achieve 1micron feature resolution and can attain 1-micron front side alignment accuracy with 20X objective. The aligners can accommodate 3 or 4 inch masks and substrate sizes from small pieces to 3 inch wafer.