Trion Minilock - Orion PECVD System
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The Trion Minilock-Orion PECVD is a dual frequency system (13.56 MHz and 380 kHz) configured for deposition of silicon dioxide films. This tool can deposit on small samples through 150mm wafers. |
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The Trion Minilock-Orion PECVD is a dual frequency system (13.56 MHz and 380 kHz) configured for deposition of silicon dioxide films. This tool can deposit on small samples through 150mm wafers. |