DekTak DXT-A surface profiler is a thin film stylus-based step height profiling tool. It can measure thin film surface topology, waviness, roughness and stress. In addition to taking two-dimensional surface profile measurement it can also produce three dimensional analysis. The Dektak allows users to program scan length, speed and stylus force. Operation allows programmed automatic X, Y and theta stage control and it can accommodate sample sizes from small pieces to 200mm wafers.